An Investigation of the Uses of Scanning Electron Microscopy in the Analysis of the Substructure Morphology of Semiconducting Devices

Author

Michael E. Courbat, University of Northern IowaFollow

Availability

Open Access Graduate Research Paper

Abstract

The purpose of this study is to determine the technical requirements of SEM failure analysis in regard to its' inclusion in the Energy and Power curriculum of the Department of Industrial Technology, University of Northern Iowa.

Year of Submission

7-17-1987

Degree Name

Master of Arts

Department

Department of Industrial Technology

First Advisor

Rex W. Pershing

Comments

If you are the rightful copyright holder of this dissertation or thesis and wish to have it removed from the Open Access Collection, please submit a request to scholarworks@uni.edu and include clear identification of the work, preferably with URL.

Date Original

7-17-1987

Object Description

1 PDF file (iv, 38 pages)

Copyright

©1987 Michael E. Courbat

Language

en

File Format

application/pdf

Recommended Citation

Courbat, Michael E., "An Investigation of the Uses of Scanning Electron Microscopy in the Analysis of the Substructure Morphology of Semiconducting Devices" (1987). Graduate Research Papers. 3610.
https://scholarworks.uni.edu/grp/3610