Faculty Publications

Investigation of the Structural Properties of Ferromagnetic Mn-Implanted Si

Document Type

Article

Keywords

Ferromagnetism, Ion implantation, Silicon, SIMS, Spintronic

Journal/Book/Conference Title

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volume

242

Issue

1-2

First Page

367

Last Page

370

Abstract

The structural properties of Si crystals that were made ferromagnetic through Mn-ion implantation are studied. 300-keV Mn+ ions were implanted at 350 °C at doses of 1-10 × 1015 cm-2 reaching peak concentrations of 0.1-0.8 at.%. Ferromagnetic hysteresis loops were obtained using a SQUID magnetometer at temperature of 300 K, yielding a saturation magnetization of 0.2 emu/g after annealing at 800 °C for 5 min. The Curie temperature for all samples was found to be greater than 400 K. After annealing, a pronounced redistribution of Mn is observed in the depth profiles as measured through SIMS profiling. The quality of the resulting crystal structure has been investigated by RBS in the channeling mode. © 2005 Elsevier B.V. All rights reserved.

Department

Department of Physics

Original Publication Date

1-1-2006

DOI of published version

10.1016/j.nimb.2005.08.132

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