Faculty Publications

Surface Deposition of Nanometer Scale Carbon Structures on Bi2Sr2CaCu2O8+δ Using a Low-Cost Scanning Electron Microscope

Document Type

Article

Keywords

Atomic force microscopy, 2D materials, Photolithography, Scanning electron microscopy, Transmission electron microscopy, Carbon based materials, Supramolecular chemistry, Nanocrystals, Nanoparticle, Chemical elements

Journal/Book/Conference Title

Journal of Vacuum Science and Technology B

Volume

43

Issue

6

Abstract

In this study, we investigate optically active nanostructures on Bi2Sr2CaCu2O8+δ (BSCCO). The nanostructures are constructed from carbon nanocrystals formed using the electron beam of a scanning electron microscope to locally decompose residual hydrocarbons at the BSCCO surface. Atomic force microscopy is used to characterize the dimensions of these structures as a function of beam exposure time. This technique has been used to induce localized intercalation to form carbon nanoparticles up to tens of nanometers into a variety of 2D materials. Cross-sectional scanning transmission electron microscopy in BSCCO shows the presence of these carbon deposits on the surface, but there is no evidence they penetrate into the BSCCO substrate. Therefore, this technique is not suitable for localized intercalation in BSCCO, and it does have promise as a cost-effective approach to pattern nanometer scale etch stops.

Department

Department of Physics

Original Publication Date

11-1-2025

DOI of published version

10.1116/6.0005045

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