Faculty Publications

Neutral Copper Cluster Sputtering Yields: Ne+, Ar+ and Xe+ Bombardment

Document Type

Article

Journal/Book/Conference Title

Nuclear Inst. and Methods in Physics Research, B

Volume

90

Issue

1-4

First Page

518

Last Page

522

Abstract

The sputtering of neutral metal clusters was investigated by measuring relative sputtering yields of copper clusters ejected from polycrystalline copper under 3.9 keV bombardment by Ne+, Ar+ and Xe+ ions at normal incidence. The yields of clusters from Ne4 bombardment were lower than those from Ar+ bombardment, and yields from Ar+ bombardment were lower than those from Xe+ bombardment. The sputtering yield ratios Ne+/Ar+ and Xe+/Ar+ were measured to be 0.56 and 1.08. The size distribution of the sputtered clusters can be fit by a power law dependence with exponents of -8.1, -8.2 and -6.2 for Ne+, Ar+ and Xe+, respectively. The similarity of the exponents of the Ne+ and AI+ power law fits indicates that the sputtering yields for these two primary ions are similar, while that for Xe+ is substantially higher, in contrast to the sputtering yield ratio data. The difference between the two measurements can be explained by assuming a systematic uncertainty in the sputtering yield ratio measurements that makes the measured ratios lower than the true values. Assuming a value at the high end of the experimental Ne+ sputtering yield range, the exponents of the power law fits exhibit a linear dependence on the total sputtering yield. © 1994.

Department

Department of Chemistry and Biochemistry

Original Publication Date

5-2-1994

DOI of published version

10.1016/0168-583X(94)95606-5

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