Next-generation CVD aluminum precursors pose new handling challenges
Solid State Technology
Among newer materials explored for advanced CVD processes are aluminum compounds in place of more traditional precursors such as tungsten hexafluoride (WF 6). New processing materials can bring with them new processing challenges (and often handling and safety issues as well). While WFe reacts with air and water to form poisonous compounds like HF, aluminum precursors tend to be pyrophoric and ignite upon reaction with air and water. With knowledge of their physical and chemical properties, and proper handling, these new aluminum precursors can be safely incorporated into CVD processes.
Original Publication Date
McGrew, Clark E., "Next-generation CVD aluminum precursors pose new handling challenges" (1997). Faculty Publications. 3987.